Comparison of Fib Tem Specimen Preparation Methods
نویسندگان
چکیده
منابع مشابه
TEM specimen preparation techniques
Transmission electron microscopy (TEM) is a powerful tool for the investigation of the microstructure of materials, providing crystallographic information and composition at the nanometer scale. For such studies, samples should be transparent to the electron beam. In this review, TEM sample preparation techniques for different classes of materials, such as metals and alloys, multilayered coatin...
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Joachim Mayer, Lucille A. Giannuzzi, Takeo Kamino, and Joseph Michael preparation can be applied to almost any material type—hard, soft, or combinations thereof. The number of materials for which successful TEM sample preparation with FIBs has been documented certainly reaches several hundred and spans from hard matter such as metals, ceramics, and composites to soft matter including polymers, ...
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The recent development of Dual-BeamTM or Cross-BeamTM FIB systems has gradually taken over the traditional single beam FIB systems. A typical FIB column contains a liquid metal ion source that produces a finely focused Ga ion beam. The primary Ga ion beam is accelerated by 30-50 kV, and directed towards the features of interest on the specimen. The incident ion beam will sputter atoms from the ...
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Preparation of Transmission Electron Microscope (TEM) samples by Focused Ion Beam (FIB) milling is one of the most precise techniques now routinely used for example in failure analysis or material science. These TEM samples are commonly prepared using Ga FIB technology, starting more than 20 years ago [13]. Presently FIB columns are commonly combined with the Scanning Electron Microscopy (SEM) ...
متن کاملComparison of different preparation methods of biological samples for FIB milling and SEM investigation.
When a new approach in microscopy is introduced, broad interest is attracted only when the sample preparation procedure is elaborated and the results compared with the outcome of the existing methods. In the work presented here we tested different preparation procedures for focused ion beam (FIB) milling and scanning electron microscopy (SEM) of biological samples. The digestive gland epitheliu...
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ژورنال
عنوان ژورنال: Microscopy and Microanalysis
سال: 2002
ISSN: 1431-9276,1435-8115
DOI: 10.1017/s1431927602101541